Nano Calc Thin Film Reflectometry System

• Analysis of single o multi-layer (3) thin film
• Resolution up to 0.1nm
• Film thickness from 10nm to 20 mm
• In-line measurement

Optional: Simultaneously ITO subtrate transmission spectrum measurement

Remark custom specification are possible

Mirocspot Measurement

The adaptation of the NanoCalc system to a microscope allows to reduce the
measurement spotsize to be as small as 4μm or even below depending on the used
microscope magnification. When using a microscope setup, exact measurement
position can also be inspected visually for better understanding of sample
surface structure

Mapping Stage

In combination with the NanoCalc-Mapping software module this allows to generate 3D profile results to control easily the homogeneity of the layer/coating thickness on the sample.

SpecEi Ellipsometer System

KP Technology - Kelvin Probe

The Kelvin Probe is a non-contact, non-destructive measurement device used to investigate properties of materials. It is based on a vibrating capacitor and measures the work function difference, or for non-metals, the surface potential, between a conducting specimen and a vibrating tip.

Typical applications are

• Corrosion
• Surface Photovoltage
• Thin Films
• Materials Processing
• Semiconductors
• Solar Cells
• Nanotechnology
• Optoelectronics
• Sensors
• Biotechnology